BUSCH Microsystems GmbH

Characterization:

Driven by ironless linear motor
Cross roller guides
Exact positioning due to accurate guidance
Nearly no cogging
Thread grid on the slide for the mounting of the payload
Incremental measuring system

Variations:

Highly torsion-resistant aluminum components (black anodized) or granite components for high accuracy requirements
With or without aperture
Absolute measuring system together with granite variation
Measuring systems made of Invar or Zerodur possible together with granite variation
With controller

Basis data – configurable to your application

Drive system	Ironless linear motor
Resolution of the measuring system	100 – 1 nm
Repeatability (mean & peak-to-peak)	Depending on resolution and controller
Stroke XY with aperture	200 – 300 mm
Stroke XY without aperture	50 – 300 mm
Max. velocity	0,3 m/s
Max. acceleration	5 m/s²

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Busch Products

XY-Stages

Standard systems made of granite with aperture

Characterization:

Variations:

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