BUSCH Microsystems GmbH | 3-Axis Systems

Characterization:

Basic construction made of granite
Highest system accuracy du to ideal adjustment of all components
Driven by linear motors in XY/ servo motor in Z
Variable position of the Z-axis possible
Particularly rigid design of the traverse
Incremental measuring system

Variations:

Absolute measuring system
Measuring systems made of Invar or Zerodur
Air bearings for highest demands
With steel frame and/or controller
X-axis combined to a XY-stage or on the traverse
Additional Z-axes possible

Basis data – configurable to your application

Drive system	Iron-core linear motors in XY/ servo motor in Z
Resolution of the measuring system	100 – 1 nm
Repeatability (mean & peak-to-peak)	Depending on resolution and controller
Stroke X	200 – 1.000 mm
Stroke Y	200 – 1.000 mm
Stroke Z	100 – 300 mm
Max. velocity	1 m/s
Max. acceleration	10 m/s²

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Busch Products

3-Axis Systems

Standard systems with X-Axis on the traverse

Characterization:

Variations:

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