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Busch Products

XY-Stages

Standard systems made of granite with magnetically preloaded air bearing

Characterization:

maintenance free
no friction
very smooth running
suitable for clean rooms
magnetically preloaded air bearings

Variations:

Without aperture
Stiffness adjustable via air bearing
Incremental or absolute measuring system
With or without control

Basis data – configurable to your application

XY travel distance	200 mm x 300 mm
Velocity	200 mm/s
Acceleration	1 m/s²
Guide accuracy	0,4 µm
Squareness	< 5 µm/m
Measuring System	Incremental, SinCos - Anlaog 1Vpp
Absolute Accuracy	0,4 µm
Repeatability	0,2 µm
Load capacity	5 kg

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